NanoBeam nB5
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- Category: Uncategorised
- Published: Monday, 18 May 2020 18:24
- Written by Super User
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{igallery 15}
The nB4 is a generation ahead of the current competition and with its field-proven performance has gained acceptance in the market place. It has excellent stability and has demonstrated an average uptime of greater than 93%. NanoBeam now introduces the nB5 which has been developed to further reduce delivery times and service costs.
nB5 development aims:
- Refine design and components to reduce routine service requirements.
- Achieve a machine-fault-downtime of less than 5% annually.
- Enhance performance
- Facilitate volume production.
Specification:
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Beam Voltage range 20kV - 100kV
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Feature size on resist <8nm
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Stitching/overlay error <25nm for 500um field
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Automatic loading 5 chuck airlock system
The nB5 system will provide a platform for further development to high deflection speed and further integrated electronics.